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高真空阀

常闭型高真空电磁阀 XSA

    ・最低使用压力：1×10-6Pa(abs)
    ・泄漏量：内部1.3×10-9Pa・m3/s、外部1.3×10-11Pa・m3/s。
    ・有2种接头和内螺纹可选。
    ・消耗功率：最多削减25％。
    ・质量：最多减小18％　0.5kg→0.41kg。
安全注意事项　特定开发品信息　环保认证(RoHS)
系列阀形式使用流体配管连接方式配管尺寸
XSA常闭空气
惰性气体		面密封接头
卡套式接头		1/4, 3/8
XSA常闭空气
惰性气体		Rc, NPT内螺纹1/8, 1/4, 3/8

产品特点

■Minimum operating pressure：1×10-6Pa(abs)
■Leakage：Internal 1.3×10-9Pa・m3/s, External 1.3×10-11Pa・m3/s
■2 types of fitting and female threads available

Face seal fitting

A fitting with high leak integrity from vacuum to positive pressure, that forms a seal through the placement of a metal gasket at the end of the sleeve and the tightening of the nut.

Compression fitting

A self-aligning tube fitting that uses ferrule rings to compress the tubing, affecting the seal when the nut is tightened.

Female thread(Rc, NPT) [New]






■Power consumption
■Weight
■Fluid temperature：5 to 60℃
■Reverse pressure potential：0.5 MPa(G)※

※ XSA1-12

■Rated voltage
■Applications
■Variations

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