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Industrial Device Communication Equipment: DeviceNet Compatible Products

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Serial Transmission System EX260

    For Output

    ∗The applicable protocols differ depending on the series.
     For details, refer to the catalog of each series.

    ・IP67
    ・RJ45 communication connectors (X205)

     ▶Related Products
     ▶IO-Link Master
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Serial Transmission System EX260
    Manual
    Series View search result
    EX260View search result
  • Serial Transmission System EX260
    DoC
    Series View search result
    EX260View search result
SeriesEnclosureCommunication protocol∗Applicable valve
EX260IP67DeviceNet™
PROFIBUS DP
CC-Link
EtherCAT
PROFINET
EtherNet/IP™
Ethernet POWERLINK
IO-Link (Only available for SY, JSY, VQC communication connectors)
PROFIsafe (Only available for SY, JSY, VQC communication connectors)
SY3000,5000,7000 (Plug-in)
JSY1000,3000,5000 (Plug-in)
VQC1000,2000,4000,5000
SV1000,2000,3000
S0700(IP40)

Serial Transmission System EX120/121/122/124/126/140/180

    For Output

    ∗The applicable protocols differ depending on the series.
     For details, refer to the catalog of each series.
SeriesEnclosureCommunication protocol∗Applicable valve
EX120IP20DeviceNet™
CC-Link
CompoNet™
JSY1000, 3000, 5000 (Plug-in)
SY3000,5000,7000 (Plug-in)
VQ1000,2000
SV1000,2000,3000,4000
EX121IP20DeviceNet™
CC-Link
CompoNet™
SY3000,5000
EX122IP20DeviceNet™
CC-Link
CompoNet™
SY3000,5000
EX124IP65CC-Link
DeviceNet™
VQ2000,4000,5000
EX126IP67CC-LinkSY3000,5000,7000 (Plug-in)
SV1000,2000,3000
VQC1000,2000,4000, 5000
EX140IP20DeviceNet™
CC-Link
SZ3000
SQ1000,2000
EX180IP20DeviceNet™
CC-Link
AnyWireASLINK (Made to order)
SY3000,5000,7000
SJ2000,3000
S0700

Serial Transmission System EX600

    For Input/Output

    ∗The applicable protocols differ depending on the series.
     For details, refer to the catalog of each series.

     ▶IO-Link Devices

    ∗ The EX600-SPN1/SPN2 series will be discontinued in October 2023.
     Please select the EX600-SPN3/SPN4 series.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Serial Transmission System EX600
    Manual
    Series View search result
    EX600View search result
  • Serial Transmission System EX600
    DoC
    Series View search result
    EX600View search result
SeriesEnclosureCommunication protocol∗Applicable valve
EX600IP67PROFIBUS DP
DeviceNet™
CC-Link
EtherNet/IP™
EtherNet/IP™ (IO-Link unit compatible)
EtherCAT
EtherCAT (IO-Link unit compatible)
PROFINET
PROFINET (IO-Link unit compatible)
MRP (PROFINET) (Made to order)
Ethernet POWERLINK (Made to order)
Modbus TCP (Made to order)
CC-Link IE Field (Made to order)
EtherNet/IP™ (IO-Link master compatible) (Made to order)
SY3000,5000,7000 (Plug-in)
JSY1000, 3000, 5000
SV1000,2000,3000
VQC1000,2000,4000,5000
S0700(IP40)

Serial Transmission System EX500

    For Input/Output, Gateway Type

    ∗The applicable protocols differ depending on the series.
     For details, refer to the catalog of each series.

    *The EX500 series is to be discontinued. When designing new equipment
     and facilities, consider using another series (EX260/EX600) instead.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Serial Transmission System EX500
    Manual
    Series View search result
    EX500View search result
  • Serial Transmission System EX500
    DoC
    Series View search result
    EX500View search result
SeriesEnclosureCommunication protocol∗Applicable valve
EX500IP67EtherNet/IP™
PROFINET
SY3000,5000,7000 (Plug-in)
VQC1000,2000,4000,5000
SV1000,2000,3000
S0700(IP40)

Serial Transmission System EX510

    For Input/Output, Gateway Type

    ∗The applicable protocols differ depending on the series.
     For details, refer to the catalog of each series.

    *The EX510 series is to be discontinued. When designing new equipment
     and facilities, consider using another series (EX260/EX600) instead.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Serial Transmission System EX510
    Manual
    Series View search result
    EX510View search result
  • Serial Transmission System EX510
    DoC
    Series View search result
    EX510View search result
SeriesEnclosureCommunication protocol∗Applicable valve
EX510IP20CC-Link
DeviceNet™
PROFIBUS DP
EtherNet/IP™ (Made to order)
PROFINET (Made to order)
SJ2000,3000
SY3000,5000,7000 (Plug-in)
SY3000,5000,7000,9000
SYJ3000,5000,7000
SQ1000,2000
SZ3000
VQ1000,2000
VQZ1000,2000,3000
S0700

Serial Transmission System EX250

    For Input/Output

    ∗The applicable protocols differ depending on the series.
    For details, refer to the catalog of each series.

    *The EX250 series is to be discontinued. When designing new equipment
     and facilities, consider using another series (EX260/EX600) instead.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Serial Transmission System EX250
    Manual
    Series View search result
    EX250View search result
  • Serial Transmission System EX250
    DoC
    Series View search result
    EX250View search result
SeriesEnclosureCommunication protocol∗Applicable valve
EX250IP67DeviceNet™
CC-Link AS-Interface
EtherNet/IP™
JSY1000, 3000, 5000 (Plug-in)
SY3000,5000,7000 (Plug-in)
VQC1000,2000,4000,5000
SV1000,2000,3000
S0700(IP40)

Step Motor Controller JXCE1/91/P1/D1/L□/M1

    ・EtherCAT, EtherNet/IP™, PROFINET, DeviceNet®,
     IO-Link, and CC-Link compatible
    ・Two types of operation command:
     Step no. defined operation, Numerical data defined operation
    ・Transition wiring of communication cables
    ・Numerical monitoring available
    ・IO-Link communication can be performed.
    ・Controller with STO sub-function/JXC□F
SeriesCompatible
motor
Power
supply
voltage
Fieldbus
JXCE1 (Standard)
JXCEF (With subfunction)
Step motor
(Servo/24 VDC)
24 VDC
±10%
EtherCAT™
JXC91 (Standard)
JXC9F (With subfunction)
Step motor
(Servo/24 VDC)
24 VDC
±10%
EtherNet/IP™
JXCP1 (Standard)
JXCPF (With subfunction)
Step motor
(Servo/24 VDC)
24 VDC
±10%
PROFINET
JXCD1 (Standard)Step motor
(Servo/24 VDC)
24 VDC
±10%
DeviceNet™
JXCL1 (Standard)
JXCLF (With subfunction)
Step motor
(Servo/24 VDC)
24 VDC
±10%
IO-Link
JXCM1 (Standard)Step motor
(Servo/24 VDC)
24 VDC
±10%
CC-Link

Fieldbus-compatible Gateway (GW) Unit LEC-G

    ・The LE□ series electric actuators are applicable to Fieldbus protocols.
    ・Conversion unit for Fieldbus network and LEC serial communication
    ・2 methods of operation:
     Step data input, numerical data input
    ・Position, speed, and other values can be checked on the PLC.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Fieldbus-compatible Gateway (GW) Unit LEC-G
    Manual
    Series View search result
    LEC-GView search result
  • Fieldbus-compatible Gateway (GW) Unit LEC-G
    DoC
    Series View search result
    LEC-GView search result
SeriesApplicable fieldbusPower supply voltageApplicable controllers
LEC-GCC-Link
DeviceNet™
PROFIBUS DP
EtherNet/IP™
24 VDC
±10%
LECA6 series

Electro-Pneumatic Regulator ITV

    ・Stepless control of air pressure in proportion to electrical signals
    ・Sensitivity: 0.2 kPa (100 kPa specification)
    ・Linearity: ±1% or less (F.S.)
    ・Hysteresis: 0.5% or less (F.S.)
    ・Communication: CC-Link, DeviceNet™, PROFIBUS DP, RS-232C, IO-Link

     ▶IO-Link Master
SeriesPort sizeSet pressure (MPa)
ITV0000Built-in One-touch fitting
φ4,φ5/32
0.001 to 0.1
0.001 to 0.5
0.001 to 0.9
ITV10001/8,1/40.005 to 0.1
0.005 to 0.5
0.005 to 0.9
ITV20001/4,3/80.005 to 0.1
0.005 to 0.5
0.005 to 0.9
ITV30001/4,3/8,1/20.005 to 0.1
0.005 to 0.5
0.005 to 0.9

Electronic Vacuum Regulator ITV

    ・Stepless control of vacuum pressure in proportion to electrical signals
    ・Communication: CC-Link, DeviceNet™, PROFIBUS DP, RS-232C
SeriesPort sizeSet pressure (MPa)
ITV009□Built-in One-touch fitting
φ4,φ5/32
-1 to -100
ITV209□1/4-1.3 to -80

Thermo-chiller/High-performance Type HRZ

This product can only be shipped to China, Taiwan, Korea, Singapore,Malaysia, and Japan. For use in regions other than the aforementioned, order the HRZ-F.

    ・Suitable for semiconductor processing equipment with a wide variety of
     features, such as high-temperature stability, a wide temperature range,
     failure diagnosis, external communication, etc.
    ・Compliant with various safety standards
    ・Compliant with UL Standards, SEMI Standards, CE-marking

  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/High-performance Type HRZ
    Manual
    Series Cooling capacity View search result
    HRZ1 kW, 2 kW,
    4 kW, 8 kW
    View search result
  • Thermo-chiller/High-performance Type HRZ
    DoC
    Series Cooling capacity View search result
    HRZ1 kW, 2 kW,
    4 kW, 8 kW
    View search result
SeriesSet temperature rangeCooling capacityTemperature stabilityCooling methodCirculating fluid
HRZ-20 to 40℃
20 to 90℃
-20 to 90℃
1 kW, 2 kW,
4 kW, 8 kW
±0.1℃Water-cooled refrigerationFluorinated fluids/Ethylene glycol aqueous solution (60%)/Tap water, Deionized water

Water-cooled Thermo-chiller/High-performance Type HRW

    ・Direct heat exchanger for in-plant circulating fluid
    ・Can control the temperature over a wide range since a compressor is not required.
    ・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
    ・Compliant with UL Standards, SEMI Standards, CE-marking
    ・It is possible to select the inverter type.
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating fluid
HRW20 to 90℃2 kW, 8 kW, 15 kW, 30 kW±0.3℃Water-cooled type
(Without compressor)
Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)

Non F-Gas (CO2 Refrigerant) Refrigerated Thermo-chiller HRZC

    ・Non F-Gas
    ・Uses a CO2 refrigerant
    ・Greatly reduced GWP
    ・GWP = 1 Compliant with each country’s refrigerant regulations
     EU refrigerant regulations: GWP150 or more
     US refrigerant regulations: GWP700 or more
     California, US refrigerant regulations: GWP750 or more
     ∗ “GWP” indicates the global warming potential. The values are based on
     the IPCC AR4.
    ・Air transport possible
    ・Eliminates the need to pay for F-Gas recovery & disposal
    ・Eliminates the need for periodic inspections based on the Fluorocarbon
     Emissions Control Act (Japan)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Non F-Gas (CO2 Refrigerant) Refrigerated Thermo-chiller HRZC
    Manual
    Series View search result
    HRZCView search result
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating
fluid
HRZC−20 to 90℃10 kW±0.1℃Water-cooled
refrigeration
Fluorinated fluids
60% ethylene glycol aqueous solution
Deionized water/Tap water

Thermo-chillers for the Semiconductor Industry INR-495-042/INR-495-043

    ・Non F-Gas (CO2 refrigerant)
    ・GWP: 1 (Natural refrigerant)
    ・EU refrigerant regulations: GWP150 or less∗
    ・US refrigerant regulations: GWP700 or less∗
    ・California, US refrigerant regulations: GWP750 or less
     ∗As of December 2023
    ・Air transport possible
     No air transport restrictions for non-toxic and non-flammable∗
     refrigerants
     ∗A1 (ASHRAE34 standard)
    ・No F-Gas management required
     Eliminates the need for periodic inspections based on the Fluorocarbon
     Emissions Control Act (Japan)
    ・No F-Gas recovery & disposal costs
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chillers for the Semiconductor Industry INR-495-042/INR-495-043
    DoC
    Series View search result
    INR-495-042
    INR-495-043
    View search result
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating
fluid
INR-495-042
INR-495-043
-20 to 708.5 kW±1.0℃Water-cooled
refrigeration
Fluorinated fluid

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