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Exhaust Line


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Aluminum High Vacuum Angle Valve XLA/C/F/G

Features
    ・Aluminum bodied
    　Uniform baking temperature
    　Lightweight, Compact
    　Minimal outgassing
    　Minimal contamination from heavy metals
    ・Bellows are replaceable.
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationValve
type		Shaft seal
type		ApplicationFlange
size
XLA-2Air
operated		Single
acting
(N.C.)		Bellows sealDust free,
Cleaned		16 to 80
XLAV-2
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows sealDust free,
Cleaned		16 to 80
XLC-2Air
operated		Double
acting		Bellows sealDust free,
Cleaned		16 to 80
XLF-2Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation,
High operating cycles		16 to 80
XLFV-2
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation,
High operating cycles		16 to 80
XLG -2Air
operated		Double
acting		O-ring sealHigh-speed operation,
High operating cycles		16 to 80

Aluminum High Vacuum Angle Valve XLA/C-100/160(-1)-X152

Features
    ・Improved durability of bellows (Flange sizes 100 and 160)
    ・Service life of two million cycles
    ・Space required for equipment can be reduced
    　Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa)
    　Increased flexibility of mounting orientation
    ・Lightweight, Compact
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationValve
type		Shaft seal
type		ApplicationFlange
size
XLA-100/160-X152Air
operated		Single
acting
(N.C.)		Bellows sealDust free,
Cleaned		100，160
XLC-100/160-1-X152Air
operated		Double
acting		Bellows sealDust free,
Cleaned		100，160

Aluminum High Vacuum Angle Valve XL□

Features
    ・High fluorine resistance
    ・Minimal outgassing
    ・Minimal contamination from heavy metals

    ∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
    　discontinued in September 2017.
    　Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationValve
type		Shaft seal
type		ApplicationFlange
size
XLAAir
operated		Single
acting
(N.C.)		Bellows sealDust-free
Cleaned		100・160
XLAV
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows sealDust-free
Cleaned		100・160
XLCAir
operated		Double
acting		Bellows sealDust-free
Cleaned		100・160
XLCV
(With solenoid valve)		Air
operated		Double
acting		Bellows sealDust-free
Cleaned		100・160
XLFAir
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation
High operating cycles		（80）・100・160
XLFV
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation
High operating cycles		（80）・100・160
XLGAir
operated		Double
acting		O-ring sealHigh-speed operation
High operating cycles		100・160
XLGV
(With solenoid valve)		Air
operated		Double
acting		O-ring sealHigh-speed operation
High operating cycles		100・160
XLDAir
operated		Single
acting
(N.C.)		Bellows/O-ring
seal		For preventing dust turbulence
For preventing a pump from
running overloaded		25 to 160
XLDV
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows/O-ring
seal		For preventing dust turbulence
For preventing a pump from
running overloaded		25 to 160
XLHManualManualBellows sealDust-free
Cleaned		16 to 50
XLSElectromagneticSingle
acting
(N.C.)		(Bellows balance)For portable equipment not
requiring air		16, 25

Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ

    ・One-touch connection and release (No tools are required.)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationShaft seal
type		Valve
type		MaterialFlange
size
XLAQAir
operated		Bellows sealSingle acting
(N.C.)		Body : Aluminum
Bellows : Stainless steel 316L		16 to 50
XLDQAir
operated		Bellows seal
O-ring seal		Single acting
(N.C.)		Body : Aluminum
Bellows : Stainless steel 316L		40, 50

Stainless Steel High Vacuum Angle/In-line Valve XM/XY

    ・The precision casting, unified composition prevents the accumulation of gas.
    ・The XM series is interchangeable with the XL series aluminum high vacuum angle valve.

    Note) Size 16 is not available for the in-line type.
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationShaft seal
type		Valve
type		MaterialFlange
size
XMA/XYAAir operatedBellows sealSingle acting
(N.C.)		Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 80 Note)
XMC/XYCAir operatedBellows sealDouble actingBody : SCS13 (Eequivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 80 Note)
XMD/XYDAir operatedBellows/O-ring
seal		Single acting
(N.C.)		Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		25 to 80
XMH/XYHManualBellows sealManualBody : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 50 Note)

Normal Close High Vacuum Solenoid Valve XSA

Features
    ・Minimum operating pressure: 1 × 10-6 Pa (abs)
    ・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
    ・2 types of fittings and female threads are available.
    ・Power consumption: Max. 25% reduction
    ・Weight: Max. 18% lighter (0.5 kg → 0.41 kg)
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesValve typeFluidPipingPort size
XSANormally closedAir
Inert gas		Face seal fitting
Compression fitting		1/4, 3/8
XSANormally closedAir
Inert gas		Rc, NPT female thread1/8, 1/4, 3/8

Compact 5-Port Solenoid Valve/Plug-in Type JSY1000/3000/5000

Features
    ・Spacer type ejector for JSY1000 with additional high-noise reduction
    　silencer [New]
    ・Size reduction has been made possible thanks to a flow increase
    　This allows for space saving, weight reduction, and a large flow rate.
    ・Power consumption: 0.1 W (With power-saving circuit), 0.4 W (Standard)
    ・Connector type manifold
    ・A 4-position dual 3-port valve is available
    ・Manifold Type no.: JJ5SY1, JJ5SY3, JJ5SY5
    ・Can be connected with the ZK2 series vacuum unit
Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Selection/Technical Data
Green Procurement (RoHS)
SeriesFlow rate characteristics
4/2→3/5（A/B→E）
C［dm3/（s・bar）］		Flow rate characteristics
4/2→3/5（A/B→E）
b		Applicable
cylinder size		Power
consumption
(W)
JSY10000.910.48φ400.2 (With power-saving circuit)
JSY30002.770.27φ500.4 (Standard)
0.1 (With power-saving circuit)
JSY50006.590.22φ800.4 (Standard)
0.1 (With power-saving circuit)

Compact 5-Port Solenoid Valve/Non Plug-in Type JSY1000/3000/5000

Features
    ・Non Plug-in Body Ported Single Unit (For Mounting P.E Plate)
    　A 3-position type has been added. [New]
    ・Size reduction possible thanks to a flow increase
    　This leads to space saving, weight reduction, and a large flow rate.
    ・Power consumption: 0.1 W (With power saving circuit), 0.4 W (Standard)
    ・4-position dual 3-port valve available
    ・Bottom ported is prepared (A, B port).
    ・Manifold type no.: JJ5SY1, JJ5SY3, JJ5SY5
    ・An M12 connector has been added. (JSY5000 only)
Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Selection/Technical Data
Green Procurement (RoHS)
SeriesFlow rate characteristics
4/2→3/5（A/B→E）
C［dm3/（s・bar）］		Flow rate ccharacteristics
4/2→3/5（A/B→E）
b		Applicable
cylinder size		Power
consumption
(W)
JSY10000.630.28φ320.2(With power saving circuit)
JSY30001.810.27φ500.4(Standard)
0.1(With power saving circuit)
JSY50003.720.18φ800.4(Standard)
0.1(With power saving circuit)

4-Port Solenoid Valve/Cassette Type Manifold SJ1000/2000/3000/4000

Features

Click here to see the catalog for
the 60JD/60GD manifold
(flat ribbon cable/PC wiring compatible type).

    ・Low-profile cassette type with baseless structure
    ・Takes up minimal space with a body width of 6.5 mm (SJ1000),
    　7.5 mm (SJ2000), 10 mm (SJ3000A), or 15 mm (SJ4000)
    ・Allows for the mixed mounting of 5 SJ series valve sizes
    ・The multi-pin connector makes it easy to add or subtract stations or to
    　exchange valves.
    ・One side solenoid
    ・4-position, dual 3-port specifications are available.
    ・Manifold type no.: SS5J1, SS5J2, SS5J3, SS5J4

    ＊The EX510 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead
Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Selection/Technical Data
Green Procurement (RoHS)
SeriesFlow rate characteristics
4/2 → 3/5 (A/B → E)
C［dm3/（s・bar）］		Flow rate characteristics
4/2→3/5（A/B→E）
b		Flow rate characteristics
4/2→3/5（A/B→E）
Cv		Applicable
cylinder size
Speed: At
100 mm/s		Power
consumption
(W)
SJ10000.320.330.08ø320.55 (Standard)
0.23 (With power-saving circuit)
SJ20000.360.130.08ø400.55 (Standard)
0.23 (With power-saving circuit)
SJ30000.560.110.12ø500.4 (Standard)
0.15 (With power-saving circuit)
SJ3000A
Large flow type		0.760.190.21ø630.4 (Standard)
0.15 (With power-saving circuit)
SJ40002.610.200.68ø800.4 (Standard)
0.15 (With power-saving circuit)

5-Port Solenoid Valve SY3000/5000/7000/9000

    ・The combined mounting of a 3-port valve and a 5-port valve is possible.
    ・Power consumption: 0.1 W (With power saving circuit)
    ・A wide variety of manifold options are available, such as the aluminum
    　body manifold, DIN rail, and stacking type manifold.
    ・Manifold type no.: SS5Y3, SS5Y5, SS5Y7, SS5Y9
    ・Supports Interface regulators

    ＊The EX510 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.

Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Selection/Technical Data
Green Procurement (RoHS)
SeriesFlow rate characteristics
4/2→5/3（A/B→EA/EB）
C［dm3/（s・bar）］		Flow rate characteristics
4/2→5/3（A/B→EA/EB）
b		Flow rate characteristics
4/2→5/3（A/B→EA/EB）
Cv		Applicable
cylinder size		Power
consumption
(W)
SY30001.10.300.26φ400.35(Standard)
0.1(With power saving circuit)
SY50002.80.290.66φ630.35(Standard)
0.1(With power saving circuit)
SY70004.50.271.1φ800.35(Standard)
0.1(With power saving circuit)
SY9000100.292.5φ1000.35(Standard)
0.1(With power saving circuit)
SY3001.10.300.26φ400.35(Standard)
0.1(With power saving circuit)
SY5002.80.290.66φ630.35(Standard)
0.1(With power saving circuit)

4-Position Dual 3-Port Valve: Body Ported/Base Mounted SY5000/7000-X701

Features
    Features two 3-port valves built into one body
    •The dimensions are the same as those of the double solenoid.
    •The 3-port valves on the A and B sides can be operated independently.
    •When used as a 3-port valve, only half the number of stations are
    　required.
    • Mixed mounting on the standard SY5000/7000 series 5-port solenoid
    　valve manifold base is possible.
Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Selection/Technical Data
Green Procurement (RoHS)
Piping typeSeries4-position dual 3-port
Type of actuation
Body ported
Base mounted		SY5000
SY7000		N.C./N.C.
N.O./N.O.
N.C./N.O.

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