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Compact 2/3 Port Solenoid Valves/Air Operated Valves
Compact Direct Operated 2 Port Solenoid Valve (2 Way Valve) VDW
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・For air, medium vacuum, water
・Body material: Aluminum, Resin (PPS), Brass, Stainless steel
・With One-touch fittings (resin body)
・IP65
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics Series Variations/Solenoid Valves List
Green Procurement (RoHS)
Model Selection/Flow Rate Characteristics Series Variations/Solenoid Valves List
Green Procurement (RoHS)
Series | Valve type | Port size | Orifice diameter |
---|---|---|---|
VDW10/20 | N.C. | φ3.2, φ4, φ6, M5, 1/8 | φ1 to φ3.2 |
Compact Direct Operated 3 Port Solenoid Valve (3 Way Valve) for Water and Air VDW
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∗ The production of the VDW10/20 series was discontinued
in December 2012. Please select the new VDW10/20 series.
∗ Excludes the VDW10/20 series manifold
∗ The production of the VDW30 series was discontinued
in July 2015. Please select the VX21 series.
∗ The production of the 3-port solenoid valve VDW200/300 series
is continued.
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Technical Data Series Variations/Solenoid Valves List
Green Procurement (RoHS)
Model Selection/Technical Data Series Variations/Solenoid Valves List
Green Procurement (RoHS)
Series | Valve type | Port size | Orifice diameter (mmø) |
---|---|---|---|
VDW200/300 | C.O. | M5 to 1/4 (8A) | 1 to 4 |
Compact/Lightweight 2 Port Solenoid Valve (2 Way Valve) for Water and Air VDW-XF
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・Compact, lightweight resin body (PPS)
・IP65
・Power consumption: 3 W (Standard), 0.5 W (With power-saving circuit)
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics Series Variations/Solenoid Valves List
Green Procurement (RoHS)
Model Selection/Flow Rate Characteristics Series Variations/Solenoid Valves List
Green Procurement (RoHS)
Series | Valve type | Port size | Orifice diameter (mmø) |
---|---|---|---|
VDW30/40-XF | N.C. | P7, P8 (Quick fastener) ø4, ø6, ø8, ø10 | 1 to 6 |
High Speed 2 Port Valve (2 Way Valve) SX10
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・High-speed response ON: 0.45 ms, OFF: 0.4 ms (±0.05 ms)
・Long service life: 5 billion cycles or more
・High frequency: 1200 Hz
・Width: 9 mm
・Low power consumption: 4 W
Series | Flow rate (L/min) | Power consumption (W) | Max. operating frequency (Hz) |
---|---|---|---|
SX10 | 50 | 80 40 10 4 | 1200 1000 550 350 |
SX10 | 100 | 80 40 10 4 | 650 550 300 200 |
SX10 | 150 | 80 40 10 4 | 600 500 250 150 |
Low Profile 2/3-Port Solenoid Valve SX90/090
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・Compact
Overall length: Approx. 38 mm (2-port), 54 mm (3-port)
Valve width/height: 10 mm
Weight: 10 g (2-port), 20 g (3-port)
・Large flow rate
C [dm3/(s·bar)]: 0.25 (2-port), 0.5 (3-port)
Flow rate [L/min (ANR)]: 45 (2-port), 90 (3-port) (At 0.2 MPa)
Series | Valve construction | C[dm3/(s·bar)] | Flow rate [L/min (ANR)] at 0.2 MPa | Type of actuation |
---|---|---|---|---|
SX91 | 2-port direct operated poppet valve | 0.25 | 45 | Normally closed |
SX92 | 2-port direct operated poppet valve | 0.12 | 22 | Universal |
SX090 | 3-port direct operated poppet valve | 0.5 | 90 | Universal |
Pilot Operated 2 Port Solenoid Valve (2 Way Valve) for Dry Air
VQ
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・High-frequency operation is possible: High-speed response 7 ms or less (VQ20), 20 ms or less (VQ30)
・Easy piping with One-touch fittings
・The dust-tight, water-jet-proof enclosure (IP65) is compatible with the DIN terminal type.
・Applications: Air-blow, Blow-off of workpieces, etc.
・Manifold type no.: VV2Q22, VV2Q32
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics Series Variations/Solenoid Valves List
Green Procurement (RoHS)
Model Selection/Flow Rate Characteristics Series Variations/Solenoid Valves List
Green Procurement (RoHS)
Series | Valve type | Port size | Orifice diameter (mmø) |
---|---|---|---|
VQ20 | N.C. | φ6 to φ12 | 3.4 |
VQ30 | N.C. | φ6 to φ12 | 4.8 |
Air Saving Impact Blow Valve IBV
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・Increased impact force due to higher peak pressure
・Instantaneous air blow reduces CO2, air consumption, and operation
time
Peak pressure: 2 to 3 times or more
CO2/Air consumption: 93% reduction
Operation time: 97% reduction
Series | Port size | Operating pressure range |
---|---|---|
IBV10 Solenoid valve type | IN: 3/8 OUT: 1/4 | 0.15 to 0.7 MPa |
IBV11 Air operated type | IN: 3/8 OUT: 1/4 Pilot port: 1/8 | 0.1 to 0.5 MPa |
Pulse Blow Valve AXTS040-X202
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・The peak pressure of repeatedly colliding air permits efficient blowing.
・CO2 emissions (Air consumption): 50% reduction
・Control for pulse generation is not required.
Pulse blow can be used by simply supplying air.
・Built-in pilot valve construction allows for stable blowing.
Series | Valve construction | Type of actuation | Frequency adjustment range |
---|---|---|---|
AXTS040□-X202 | Metal seal | Internal pilot | 1 to 12 Hz |
Pulse Blow Valve AXTS040□-□□-X2
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・The peak pressure of repeatedly colliding air permits efficient blowing.
・Air consumption: Reduced by 50% or more
・Control for pulse generation is not required.
Pulse blow can be used by simply supplying air.
Series | Valve construction | Type of actuation | Frequency adjustment range |
---|---|---|---|
AXTS040□-2□-X2 | Metal seal | Internal pilot | 1 to 5Hz |
AXTS040□-3□-X2 | Metal seal | External pilot | 1 to 8Hz |
Compact Direct Operated 2/3-Port Solenoid Valve for Chemical Liquids LVM
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・Low particle generation, Oil-free, Metal-free * Fluid contact parts
・Isolated structure
The solenoid drive body is separated from the fluid area by a diaphragm.
・Power consumption: 1.0 W or less (With power saving circuit)
・Change in volume (Pumping volume): 0.01 µL or less
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics Series Variations/Solenoid Valves List
Green Procurement (RoHS)
Model Selection/Flow Rate Characteristics Series Variations/Solenoid Valves List
Green Procurement (RoHS)
Series | Valve construction | Valve type | Operating pressure range | Orifice diameter (mmø) |
---|---|---|---|---|
LVM07 Base mounted | Direct operated rocker type | N.C. | -75 kPa to 0.1 MPa | 0.8 |
LVM09 Body ported Base mounted | Direct operated rocker type | N.C. N.O. Universal | -75 kPa to 0.2 MPa | 1 (Body ported) 1.1 (Base mounted) |
LVM10 Body ported Base mounted | Direct operated rocker type | N.C. N.O. Universal | -75 kPa to 0.25 MPa | 1.4 |
LVM15 Body ported Base mounted | Direct operated rocker type | N.C. N.O. Universal | -75 kPa to 0.25 MPa (Max. 0.6 MPa) | 1.6 1 (High-pressure type) |
LVM20 Body ported Base mounted | Direct operated rocker type | N.C. N.O. Universal | -75 kPa to 0.3 MPa (Body ported: 0.25 MPa) | 2 |
LVM1□ Body ported Base mounted | Direct operated poppet type | N.C. | 0 to 0.25 MPa | 1.5 |
LVM3□ Body ported Base mounted | Direct operated poppet type | N.C. | -90 kPa to 0.2 MPa | 5 |
Direct Operated 2/3 Port Isolated Valve LVMK20/200
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・Low particle generation, Oil-free, Metal-free
・Fluids: Air, Water, Deionized water, Diluent, Cleaning fluid
・Isolated structure: The solenoid drive body is separated from the fluid area by a block seal.
・Easy piping
・Minimal dead space
・Flow adjustment is not required.
Series | Valve type | Piping direction | Fluid contact material |
---|---|---|---|
LVMK | N.C. Universal | Bottom ported Side ported | Body: PPS Seal: EPDM, FKM |
Pinch Valve LPV
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・A 3-port type has been added. [New]
Valve type
N.C. on one side (Normally in clamping position)
N.O. on one side (Normally in unclamping position)
・Highly resistant to contamination and reduces valve failures
・Applicable tubing:
Silicone, PharMed®BPT, Tygon®
・Power consumption: 2.0 W
・Compact: Valve width 20 mm
・Easy tubing replacement
Series | Type of actuation | Valve type | Applicable tubing |
---|---|---|---|
LPV | Direct operated solenoid | N.C. N.O. | Silicone, PharMed®BPT“Hardness of 64 (shore A) or lower (reference)” |
Diaphragm Valve for Ultra High Purity AZ
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・Cleaned for high purity semiconductor applications and clean room assembled
・Helium leak tested
・SEMI Standards compliant
・User-friendly forged body
Safety Instructions Process Gas Equipment/Common Precautions Series Variations
Valve and Regulator Recommendations Technical Data/Glossary of Terms
Green Procurement (RoHS)
Valve and Regulator Recommendations Technical Data/Glossary of Terms
Green Procurement (RoHS)
Series | Type | Body material | Connection type | Connection size |
---|---|---|---|---|
AZ | Air operated type | 316L SS | Face seal Tube weld | 1/4'' 3/8'' 1/2 |
AZ | Manually operated | 316L SS | Face seal Tube weld | 1/4'' 3/8'' 1/2 |
Normal Close High Vacuum Solenoid Valve XSA
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・Minimum operating pressure: 1 × 10-6 Pa (abs)
・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
・2 types of fittings and female threads are available.
・Power consumption: Max. 25% reduction
・Weight: Max. 18% lighter (0.5 kg → 0.41 kg)
Series | Valve type | Fluid | Piping | Port size |
---|---|---|---|---|
XSA | Normally closed | Air Inert gas | Face seal fitting Compression fitting | 1/4, 3/8 |
XSA | Normally closed | Air Inert gas | Rc, NPT female thread | 1/8, 1/4, 3/8 |