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|High Vacuum Equipment
Aluminum High Vacuum Angle Valve
XLA/C-100・160（-1）-X152 Updated Nov-18
XLA/C-100・160（-1）-X152 Updated Nov-18
- Improved durability of bellows (Flange sizes 100 and 160)
- Service life of two million cycles
- Space required for equipment can be reduced
Without restriction on exhaust direction
(two ways: from valve element side to bellows side and vice versa)
Increased flexibility of mounting orientation - Lightweight, Compact
For 300 mm Wafer
: Parallel Seal Type Slit Valve
XGTP Series Updated Feb-18
: Parallel Seal Type Slit Valve
XGTP Series Updated Feb-18
- Long service life 3 million cycles (at ordinary temperature)
- Low particle generation Reduced by 1/5 or more
(compared with the exisiting product) - Easier maintenance
Easy replacement of bellows
Gate can be replaced from above. (Made to order) - Safety measures
Mechanical end lock mechanism is adopted.
Aluminum High Vacuum Angle Valve
XL□ Series Updated Jan-17
XL□ Series Updated Jan-17
- A model with a solenoid valve has been added. [New]
- A heat-resistant 2-color indicator solid state auto switch has been added to the high-temperature type. [New]
