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High Vacuum Valves

Aluminum High Vacuum Angle Valve XL□

    ・High fluorine resistance
    ・Minimal outgassing
    ・Minimal contamination from heavy metals

    ∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
     discontinued in September 2017.
     Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
SeriesActuationValve
type
Shaft seal
type
ApplicationFlange
size
XLAAir
operated
Single
acting
(N.C.)
Bellows sealDust-free
Cleaned
16 to 160
XLAV
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
Bellows sealDust-free
Cleaned
16 to 160
XLCAir
operated
Double
acting
Bellows sealDust-free
Cleaned
16 to 160
XLCV
(With solenoid valve)
Air
operated
Double
acting
Bellows sealDust-free
Cleaned
16 to 80
XLFAir
operated
Single
acting
(N.C.)
O-ring sealHigh-speed operation
High operating cycles
16 to 160
XLFV
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
O-ring sealHigh-speed operation
High operating cycles
16 to 160
XLGAir
operated
Double
acting
O-ring sealHigh-speed operation
High operating cycles
16 to 160
XLGV
(With solenoid valve)
Air
operated
Double
acting
O-ring sealHigh-speed operation
High operating cycles
16 to 80
XLDAir
operated
Single
acting
(N.C.)
Bellows/O-ring
seal
For preventing dust turbulence
For preventing a pump from
running overloaded
25 to 160
XLDV
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
Bellows/O-ring
seal
For preventing dust turbulence
For preventing a pump from
running overloaded
25 to 160
XLHManualManualBellows sealDust-free
Cleaned
16 to 50
XLSElectromagneticSingle
acting
(N.C.)
(Bellows balance)For portable equipment not
requiring air
16, 25

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