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Industrial Device Communication Equipment: DeviceNet Compatible Products


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Serial Transmission System EX260

Features
    For Output

    ∗The applicable protocols differ depending on the series.
    　For details, refer to the catalog of each series.

    ・IP67
    ・RJ45 communication connectors (X205)

    　▶Related Products
    　▶IO-Link Master
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Serial Transmission System EX260
    Manual
    Series View search result
    EX260View search result
  • Serial Transmission System EX260
    DoC
    Series View search result
    EX260View search result
Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Fieldbus System Precautions
Industrial IoT Cybersecurity　Glossary of Fieldbus Terms　Series Variations/Applicable Valve Series　Safety over Fieldbus with PROFIsafe　Green Procurement (RoHS)　IO-Link Master
SeriesEnclosureCommunication protocol∗Applicable valve
EX260IP67DeviceNet™
PROFIBUS DP
CC-Link
EtherCAT
PROFINET
EtherNet/IP™
Ethernet POWERLINK
IO-Link (Only available for SY, JSY, VQC communication connectors)
PROFIsafe (Only available for SY, JSY, VQC communication connectors)		SY3000，5000，7000 (Plug-in)
JSY1000，3000，5000 (Plug-in)
VQC1000，2000，4000，5000
SV1000，2000，3000
S0700（IP40）

Serial Transmission System EX120/121/122/124/126/140/180

    For Output

    ∗The applicable protocols differ depending on the series.
    　For details, refer to the catalog of each series.
Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Fieldbus System Precautions
Industrial IoT Cybersecurity　Glossary of Fieldbus Terms　Series Variations/Applicable Valve Series
Green Procurement (RoHS)
SeriesEnclosureCommunication protocol∗Applicable valve
EX120IP20DeviceNet™
CC-Link
CompoNet™		JSY1000, 3000, 5000 (Plug-in)
SY3000，5000，7000 (Plug-in)
VQ1000，2000
SV1000，2000，3000，4000
EX121IP20DeviceNet™
CC-Link
CompoNet™		SY3000，5000
EX122IP20DeviceNet™
CC-Link
CompoNet™		SY3000，5000
EX124IP65CC-Link
DeviceNet™		VQ2000，4000，5000
EX126IP67CC-LinkSY3000，5000，7000 (Plug-in)
SV1000，2000，3000
VQC1000，2000，4000, 5000
EX140IP20DeviceNet™
CC-Link		SZ3000
SQ1000，2000
EX180IP20DeviceNet™
CC-Link
AnyWireASLINK (Made to order)		SY3000，5000，7000
SJ2000，3000
S0700

Serial Transmission System EX600

Features
    For Input/Output

    ∗The applicable protocols differ depending on the series.
    　For details, refer to the catalog of each series.

    　▶IO-Link Devices

    ∗ The EX600-SPN1/SPN2 series will be discontinued in October 2023.
    　Please select the EX600-SPN3/SPN4 series.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Serial Transmission System EX600
    Manual
    Series View search result
    EX600View search result
  • Serial Transmission System EX600
    DoC
    Series View search result
    EX600View search result
Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Fieldbus System Precautions
Industrial IoT Cybersecurity　Glossary of Fieldbus Terms　Series Variations/Applicable Valve Series
Green Procurement (RoHS)
SeriesEnclosureCommunication protocol∗Applicable valve
EX600IP67PROFIBUS DP
DeviceNet™
CC-Link
EtherNet/IP™
EtherNet/IP™ (IO-Link unit compatible)
EtherCAT
EtherCAT (IO-Link unit compatible)
PROFINET
PROFINET (IO-Link unit compatible)
MRP (PROFINET) (Made to order)
Ethernet POWERLINK (Made to order)
Modbus TCP (Made to order)
CC-Link IE Field (Made to order)
EtherNet/IP™ (IO-Link master compatible) (Made to order)		SY3000，5000，7000 (Plug-in)
JSY1000, 3000, 5000
SV1000，2000，3000
VQC1000，2000，4000，5000
S0700（IP40）

Serial Transmission System EX500

Features
    For Input/Output, Gateway Type

    ∗The applicable protocols differ depending on the series.
    　For details, refer to the catalog of each series.

    ＊The EX500 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Serial Transmission System EX500
    Manual
    Series View search result
    EX500View search result
  • Serial Transmission System EX500
    DoC
    Series View search result
    EX500View search result
Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Fieldbus System Precautions
Industrial IoT Cybersecurity　Glossary of Fieldbus Terms　Series Variations/Applicable Valve Series
Green Procurement (RoHS)
SeriesEnclosureCommunication protocol∗Applicable valve
EX500IP67EtherNet/IP™
PROFINET		SY3000，5000，7000 (Plug-in)
VQC1000，2000，4000，5000
SV1000，2000，3000
S0700（IP40）

Serial Transmission System EX510

    For Input/Output, Gateway Type

    ∗The applicable protocols differ depending on the series.
    　For details, refer to the catalog of each series.

    ＊The EX510 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Serial Transmission System EX510
    Manual
    Series View search result
    EX510View search result
  • Serial Transmission System EX510
    DoC
    Series View search result
    EX510View search result
Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Fieldbus System Precautions
Industrial IoT Cybersecurity　Glossary of Fieldbus Terms　Series Variations/Applicable Valve Series
Green Procurement (RoHS)
SeriesEnclosureCommunication protocol∗Applicable valve
EX510IP20CC-Link
DeviceNet™
PROFIBUS DP
EtherNet/IP™ (Made to order)
PROFINET (Made to order)		SJ2000，3000
SY3000，5000，7000 (Plug-in)
SY3000，5000，7000，9000
SYJ3000，5000，7000
SQ1000，2000
SZ3000
VQ1000，2000
VQZ1000，2000，3000
S0700

Serial Transmission System EX250

    For Input/Output

    ∗The applicable protocols differ depending on the series.
    For details, refer to the catalog of each series.

    ＊The EX250 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Serial Transmission System EX250
    Manual
    Series View search result
    EX250View search result
  • Serial Transmission System EX250
    DoC
    Series View search result
    EX250View search result
Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Fieldbus System Precautions
Industrial IoT Cybersecurity　Glossary of Fieldbus Terms　Series Variations/Applicable Valve Series
Green Procurement (RoHS)
SeriesEnclosureCommunication protocol∗Applicable valve
EX250IP67DeviceNet™
CC-Link AS-Interface
EtherNet/IP™		JSY1000, 3000, 5000 (Plug-in)
SY3000，5000，7000 (Plug-in)
VQC1000，2000，4000，5000
SV1000，2000，3000
S0700（IP40）

Step Motor Controller JXCE1/91/P1/D1/L□/M1

Features
    ・EtherCAT, EtherNet/IP™, PROFINET, DeviceNet®,
    　IO-Link, and CC-Link compatible
    ・Two types of operation command:
    　Step no. defined operation, Numerical data defined operation
    ・Transition wiring of communication cables
    ・Numerical monitoring available
    ・IO-Link communication can be performed.
    ・Controller with STO sub-function/JXC□F
Safety Instructions　Electric Actuators/Precautions　Features　Series Variations
Simplified Selection Flow Chart　Green Procurement (RoHS)　CE/UL-compliance List
SeriesCompatible
motor		Power
supply
voltage		Fieldbus
JXCE1 (Standard)
JXCEF (With subfunction)		Step motor
(Servo/24 VDC)		24 VDC
±10%		EtherCAT™
JXC91 (Standard)
JXC9F (With subfunction)		Step motor
(Servo/24 VDC)		24 VDC
±10%		EtherNet/IP™
JXCP1 (Standard)
JXCPF (With subfunction)		Step motor
(Servo/24 VDC)		24 VDC
±10%		PROFINET
JXCD1 (Standard)Step motor
(Servo/24 VDC)		24 VDC
±10%		DeviceNet™
JXCL1 (Standard)
JXCLF (With subfunction)		Step motor
(Servo/24 VDC)		24 VDC
±10%		IO-Link
JXCM1 (Standard)Step motor
(Servo/24 VDC)		24 VDC
±10%		CC-Link

Fieldbus-compatible Gateway (GW) Unit LEC-G

    ・The LE□ series electric actuators are applicable to Fieldbus protocols.
    ・Conversion unit for Fieldbus network and LEC serial communication
    ・2 methods of operation:
    　Step data input, numerical data input
    ・Position, speed, and other values can be checked on the PLC.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Fieldbus-compatible Gateway (GW) Unit LEC-G
    Manual
    Series View search result
    LEC-GView search result
  • Fieldbus-compatible Gateway (GW) Unit LEC-G
    DoC
    Series View search result
    LEC-GView search result
Safety Instructions　Electric Actuators/Precautions　Features
Series Variations　Simplified Selection Flow Chart　Wiring Method
Green Procurement (RoHS)　CE/UL-compliance List
SeriesApplicable fieldbusPower supply voltageApplicable controllers
LEC-GCC-Link
DeviceNet™
PROFIBUS DP
EtherNet/IP™		24 VDC
±10%		LECA6 series

Electro-Pneumatic Regulator ITV

Features
    ・Stepless control of air pressure in proportion to electrical signals
    ・Sensitivity: 0.2 kPa (100 kPa specification)
    ・Linearity: ±1% or less (F.S.)
    ・Hysteresis: 0.5% or less (F.S.)
    ・Communication: CC-Link, DeviceNet™, PROFIBUS DP, RS-232C, IO-Link

    　▶IO-Link Master
Safety Instructions　F.R.L. Units/Precautions　Series Variations/Pressure Control Equipment
Green Procurement (RoHS)　IO-Link Master　Electro-Pneumatic Regulator Application Examples
SeriesPort sizeSet pressure (MPa)
ITV0000Built-in One-touch fitting
φ4，φ5/32		0.001 to 0.1
0.001 to 0.5
0.001 to 0.9
ITV10001/8，1/40.005 to 0.1
0.005 to 0.5
0.005 to 0.9
ITV20001/4，3/80.005 to 0.1
0.005 to 0.5
0.005 to 0.9
ITV30001/4，3/8，1/20.005 to 0.1
0.005 to 0.5
0.005 to 0.9

Electronic Vacuum Regulator ITV

Features
    ・Stepless control of vacuum pressure in proportion to electrical signals
    ・Communication: CC-Link, DeviceNet™, PROFIBUS DP, RS-232C
Safety Instructions　F.R.L. Units/Precautions　Series Variations/Pressure Control Equipment　Green Procurement (RoHS)
SeriesPort sizeSet pressure (MPa)
ITV009□Built-in One-touch fitting
φ4，φ5/32		－1 to －100
ITV209□1/4－1.3 to －80

Thermo-chiller/High-performance Type HRZ

This product can only be shipped to China, Taiwan, Korea, Singapore,Malaysia, and Japan. For use in regions other than the aforementioned, order the HRZ-F.

    ・Suitable for semiconductor processing equipment with a wide variety of
    　features, such as high-temperature stability, a wide temperature range,
    　failure diagnosis, external communication, etc.
    ・Compliant with various safety standards
    ・Compliant with UL Standards, SEMI Standards, CE-marking

  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Thermo-chiller/High-performance Type HRZ
    Manual
    Series Cooling capacity View search result
    HRZ1 kW, 2 kW,
    4 kW, 8 kW    		View search result
  • Thermo-chiller/High-performance Type HRZ
    DoC
    Series Cooling capacity View search result
    HRZ1 kW, 2 kW,
    4 kW, 8 kW    		View search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature rangeCooling capacityTemperature stabilityCooling methodCirculating fluid
HRZ-20 to 40℃
20 to 90℃
-20 to 90℃		1 kW, 2 kW,
4 kW, 8 kW		±0.1℃Water-cooled refrigerationFluorinated fluids/Ethylene glycol aqueous solution (60%)/Tap water, Deionized water

Water-cooled Thermo-chiller/High-performance Type HRW

    ・Direct heat exchanger for in-plant circulating fluid
    ・Can control the temperature over a wide range since a compressor is not required.
    ・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
    ・Compliant with UL Standards, SEMI Standards, CE-marking
    ・It is possible to select the inverter type.
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling
method		Circulating fluid
HRW20 to 90℃2 kW, 8 kW, 15 kW, 30 kW±0.3℃Water-cooled type
(Without compressor)		Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)

Non F-Gas (CO2 Refrigerant) Refrigerated Thermo-chiller HRZC

Features
    ・Non F-Gas
    ・Uses a CO2 refrigerant
    ・Greatly reduced GWP
    ・GWP = 1 Compliant with each country’s refrigerant regulations
    　EU refrigerant regulations: GWP150 or more
    　US refrigerant regulations: GWP700 or more
    　California, US refrigerant regulations: GWP750 or more
    　∗ “GWP” indicates the global warming potential. The values are based on
    　the IPCC AR4.
    ・Air transport possible
    ・Eliminates the need to pay for F-Gas recovery & disposal
    ・Eliminates the need for periodic inspections based on the Fluorocarbon
    　Emissions Control Act (Japan)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling
method		Circulating
fluid
HRZC−20 to 90℃10 kW±0.1℃Water-cooled
refrigeration		Fluorinated fluids
60% ethylene glycol aqueous solution
Deionized water/Tap water

Thermo-chillers for the Semiconductor Industry INR-495-042/INR-495-043

Features
    ・Non F-Gas (CO2 refrigerant)
    ・GWP: 1 (Natural refrigerant)
    ・EU refrigerant regulations: GWP150 or less∗
    ・US refrigerant regulations: GWP700 or less∗
    ・California, US refrigerant regulations: GWP750 or less
    　∗As of December 2023
    ・Air transport possible
    　No air transport restrictions for non-toxic and non-flammable∗
    　refrigerants
    　∗A1 (ASHRAE34 standard)
    ・No F-Gas management required
    　Eliminates the need for periodic inspections based on the Fluorocarbon
    　Emissions Control Act (Japan)
    ・No F-Gas recovery & disposal costs
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chillers for the Semiconductor Industry INR-495-042/INR-495-043
    DoC
    Series View search result
    INR-495-042
    INR-495-043    		View search result
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling
method		Circulating
fluid
INR-495-042
INR-495-043		-20 to 708.5 kW±1.0℃Water-cooled
refrigeration		Fluorinated fluid

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