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High Vacuum Valves


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Aluminum High Vacuum Angle Valve XLA/C/F/G

Features
    ・Aluminum bodied
    　Uniform baking temperature
    　Lightweight, Compact
    　Minimal outgassing
    　Minimal contamination from heavy metals
    ・Bellows are replaceable.
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationValve
type		Shaft seal
type		ApplicationFlange
size
XLA-2Air
operated		Single
acting
(N.C.)		Bellows sealDust free,
Cleaned		16 to 80
XLAV-2
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows sealDust free,
Cleaned		16 to 80
XLC-2Air
operated		Double
acting		Bellows sealDust free,
Cleaned		16 to 80
XLF-2Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation,
High operating cycles		16 to 80
XLFV-2
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation,
High operating cycles		16 to 80
XLG -2Air
operated		Double
acting		O-ring sealHigh-speed operation,
High operating cycles		16 to 80

Aluminum High Vacuum Angle Valve XLA/C-100/160(-1)-X152

Features
    ・Improved durability of bellows (Flange sizes 100 and 160)
    ・Service life of two million cycles
    ・Space required for equipment can be reduced
    　Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa)
    　Increased flexibility of mounting orientation
    ・Lightweight, Compact
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationValve
type		Shaft seal
type		ApplicationFlange
size
XLA-100/160-X152Air
operated		Single
acting
(N.C.)		Bellows sealDust free,
Cleaned		100，160
XLC-100/160-1-X152Air
operated		Double
acting		Bellows sealDust free,
Cleaned		100，160

Aluminum High Vacuum Angle Valve XL□

Features
    ・High fluorine resistance
    ・Minimal outgassing
    ・Minimal contamination from heavy metals

    ∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
    　discontinued in September 2017.
    　Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationValve
type		Shaft seal
type		ApplicationFlange
size
XLAAir
operated		Single
acting
(N.C.)		Bellows sealDust-free
Cleaned		16 to 160
XLAV
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows sealDust-free
Cleaned		16 to 160
XLCAir
operated		Double
acting		Bellows sealDust-free
Cleaned		16 to 160
XLCV
(With solenoid valve)		Air
operated		Double
acting		Bellows sealDust-free
Cleaned		16 to 80
XLFAir
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation
High operating cycles		16 to 160
XLFV
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation
High operating cycles		16 to 160
XLGAir
operated		Double
acting		O-ring sealHigh-speed operation
High operating cycles		16 to 160
XLGV
(With solenoid valve)		Air
operated		Double
acting		O-ring sealHigh-speed operation
High operating cycles		16 to 80
XLDAir
operated		Single
acting
(N.C.)		Bellows/O-ring
seal		For preventing dust turbulence
For preventing a pump from
running overloaded		25 to 160
XLDV
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows/O-ring
seal		For preventing dust turbulence
For preventing a pump from
running overloaded		25 to 160
XLHManualManualBellows sealDust-free
Cleaned		16 to 50
XLSElectromagneticSingle
acting
(N.C.)		(Bellows balance)For portable equipment not
requiring air		16, 25

Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ

    ・One-touch connection and release (No tools are required.)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationShaft seal
type		Valve
type		MaterialFlange
size
XLAQAir
operated		Bellows sealSingle acting
(N.C.)		Body : Aluminum
Bellows : Stainless steel 316L		16 to 50
XLDQAir
operated		Bellows seal
O-ring seal		Single acting
(N.C.)		Body : Aluminum
Bellows : Stainless steel 316L		40, 50

Stainless Steel High Vacuum Angle/In-line Valve XM/XY

    ・The precision casting, unified composition prevents the accumulation of gas.
    ・The XM series is interchangeable with the XL series aluminum high vacuum angle valve.

    Note) Size 16 is not available for the in-line type.
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationShaft seal
type		Valve
type		MaterialFlange
size
XMA/XYAAir operatedBellows sealSingle acting
(N.C.)		Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 80 Note)
XMC/XYCAir operatedBellows sealDouble actingBody : SCS13 (Eequivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 80 Note)
XMD/XYDAir operatedBellows/O-ring
seal		Single acting
(N.C.)		Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		25 to 80
XMH/XYHManualBellows sealManualBody : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 50 Note)

Normal Close High Vacuum Solenoid Valve XSA

Features
    ・Minimum operating pressure: 1 × 10-6 Pa (abs)
    ・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
    ・2 types of fittings and female threads are available.
    ・Power consumption: Max. 25% reduction
    ・Weight: Max. 18% lighter (0.5 kg → 0.41 kg)
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesValve typeFluidPipingPort size
XSANormally closedAir
Inert gas		Face seal fitting
Compression fitting		1/4, 3/8
XSANormally closedAir
Inert gas		Rc, NPT female thread1/8, 1/4, 3/8

Smooth Vent Valve XVD

    ・The valve/needle valve-integrated construction requires only 1/4 the piping space of previous models.
    ・Particle numbers have been significantly reduced through the use of a metal diaphragm in the sheet portion.
    ・Flow of both the initial air supply and the main air supply can be adjusted.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesValve typeFluidPipingPort size
XVDNormally closed
(Pressurize to open, Spring seal)		Nitrogen, Air,
Inert gas, etc.		VCR®
Swagelok®		1/4B

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