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Product Information » WEB Catalog » Equipment for the Semiconductor Industries (Temperature Adjustment Line) » Chiller Compliant Regulations

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Product List

Air Management System
- Air Management System
Directional Control Valves
- Pilot Operated 4/5 Port Solenoid Valves
- Pilot Operated 3 Port Solenoid Valves
- Direct Operated 3/4/5 Port Solenoid Valves
- Reduced-wiring Fieldbus System (Serial Transmission System)
- Wireless System
- Air Operated Valves
- Mechanical Valves/Transmitters
- Finger Valve/Hand Valves/Residual Relief 3 Port Valve
- Blow Guns
- Power Valves
- ISO Valves
- Explosion-Proof Valves
Air Cylinders
- Standard Air Cylinders (Round Type）
- Standard Air Cylinders (Square Cover）
- Compact Air Cylinders
- Environment Resistant Cylinders
- Floating Joints/Rod End
- Air-hydro Units
- Mechanically Jointed Rodless Cylinders
- Magnetically Coupled Rodless Cylinders
- Table Cylinders
- Guide Cylinders
- Dual Rod Cylinders
- Lock Cylinders/Cylinder with An End Lock
- Fine Lock Cylinders
- Specialty Cylinders
- Clamp Cylinders
- Pin Shift Cylinder
- Stopper Cylinders
- Stroke Reading Cylinders
- Valve Mounted Air Cylinders
- ISO Cylinders: ISO Standards (6432)
- ISO Cylinders: ISO Standards (15552)
- ISO Cylinders: ISO Standards (21287)
- ISO Cylinders
- Shock Absorbers
- Auto Switches
- Wireless Auto Switches
- Actuator Position Sensor
- Flow Control Equipment
Rotary Actuators/Air Grippers
- Rotary Actuators Vane Type
- Rotary Actuators Rack & Pinion Type
- Parallel Type Air Grippers
- Angular Type Air Grippers
- Elastic Finger
- Magnet Grippers
- Air Gripper Unit for Collaborative Robots
- Auto Switches
- Position Sensor
Electric Actuators/Cylinders
- e-Actuator
- Manifold Controller/Manifold Controller Compatible Electric Actuator
- Battery-less Absolute Encoder Type
- Slider Type
- Rod Type/Guide Rod Type
- Slide Tables
- Miniature
- Rotary Tables
- Grippers
- Grippers for Collaborative Robots
- Controllers/Drivers
- Environment
- Motorless Type
- Mounting Kit for Multi-Axis System
- Electric Cylinders
- Card Motor
- Made to Order
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other)
- Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
- Vacuum Ejectors
- Vacuum Gripper System (Foam Type)
- Vacuum Release Valve Units
- Air Suction Filters
- Vacuum Pads (Vacuum Suction Cups)
- Special Pads
- Gripper for Collaborative Robots
- Vacuum Saving Valves
- Magnet Buffer
- Vacuum Flow
- Vacuum Regulators
- Related Equipment for Vacuum Systems
Grippers for Collaborative Robots
- Electric Grippers
- Electric Vacuum Grippers (Built-in Vacuum Pump Type)
- Air Grippers
- Vacuum Grippers (Ejector Type)
- Magnet Grippers
- Elastic Finger
- Multi Hand Adapter
- Tool Changer
Compact Compressor
- Compact Compressor
Air Preparation Equipment
- Aftercoolers/Air Tanks
- Air Dryers
- Air Preparation Filters
- Auto Drains/Differential Pressure Gauges
Modular F.R.L./Pressure Control Equipment
- Modular F.R.L.
- Connectable Modular Components
- Regulators
- Electro-Pneumatic Regulators
- Proportional Control Valve
- Proportional Valves
- Booster Regulators
- Air Management System
Modular F.R.L. Units
- Modular F.R.L. Units/Air Combination
- Air Filters/Mist Separators/Micro Mist Separators
- Lubricators
- Modular Adapter
- Soft Start up Valves
- Pressure Relief 3 Port Valves
- Regulators
- Filter Regulators
- Modular Connection Compatible Devices
Pressure Control Equipment
- Regulators
- Electro-Pneumatic Regulators
- Proportional Valves
- Proportional Control Valve
- Air Management System
Booster Regulators
- Booster Regulators
Lubrication Equipment
- Lubrication Equipment
Gas Generator
- Gas Generator
Fittings and Tubing
- Fittings for General Purposes
- Fittings for General Purposes(S Couplers/Multi-connectors)
- Fittings for Special Environments
- Fittings for Special Environments(Clean/Fluoropolymer)
- Tubing
- Tubing(Tubing for Special Environments)
- Tubing(Fluoropolymer/Clean)
- Related Products
Flow Control Equipment
- Speed Controllers for General Purposes
- Speed Controllers for Low Speed Control
- Speed Controllers Special Environments
- Speed Controllers with Special Functions
- Tool Operation Type Speed Controllers
- Air Saving Speed Controllers Air Saving Valves
- Remote control valve (Electric speed controller)
- Related Equipment
Silencers/Exhaust Cleaners/Pressure Gauges
- Silencers
- Exhaust Cleaners
- Pressure Gauges
Air Blowing Equipment
- Air Blowing Equipment
Switches/Sensors/Controller
- Electronic Pressure Switches/Sensors (Self-contained Type)
- Electronic Pressure Switches/Sensors (Remote Type)
- Mechanical Pressure Switches
- Electronic Flow Switches/Sensors
- Clamp-on Type Flow Sensor
- Mechanical Flow Switches
- Air Management System
- Controllers
- Electronic Temperature & Humidity Switches
- Auto Switches for Air Cylinders
- Auto Switches for Rotary Actuators and Air Grippers
- Position Sensor
Static Neutralization Equipment
- Static Neutralization Equipment Ionizer Bar Type
- Static Neutralization Equipment Nozzle Type Ionizer
- Static Neutralization Equipment Fan Type Ionizer
- Static Neutralization Equipment Ionizer Gun
- Static Neutralization Equipment Desktop Duster Box
- Static Neutralization Equipment Electrostatic Sensor/Sensor Monitor/Meter
- Static Neutralization Equipment/Ionizers
Industrial Device Communication Equipment/Wireless System
- Wireless System: PROFINET Compatible Products
- Wireless System: EtherNet/IP Compatible Products
- Wireless System: EtherCAT Compatible Products
- Wireless System: IO-Link Compatible Products
- Wireless System: CC-Link Compatible Products
- Wireless System: DeviceNet Compatible Products
- Industrial Device Communication Equipment: PROFINET Compatible Products
- Industrial Device Communication Equipment: EtherNet/IP Compatible Products
- Industrial Device Communication Equipment: EtherCAT Compatible Products
- Industrial Device Communication Equipment: Modbus TCP Compatible Products
- Industrial Device Communication Equipment: ETHERNET POWERLINK Compatible Products
- Industrial Device Communication Equipment: CC-Link IE Field Compatible Products
- Industrial Device Communication Equipment: SSCNET III Compatible Products
- Industrial Device Communication Equipment: MECHATROLINK-Ⅲ Compatible Products
- Industrial Device Communication Equipment: PROFIsafe Compatible Products
- Industrial Device Communication Equipment: IO-Link Compatible Products
- Industrial Device Communication Equipment: PROFIBUS Compatible Products
- Industrial Device Communication Equipment: DeviceNet Compatible Products
- Industrial Device Communication Equipment: CC-Link Compatible Products
- Industrial Device Communication Equipment: AS-interface Compatible Products
- Industrial Device Communication Equipment: CompoNet Compatible Products
- Industrial Device Communication Equipment: Interbus Compatible Products
- Industrial Device Communication Equipment: MECHATROLINK-Ⅱ Compatible Products
- Other: RS232C Compatible Products
- Other: RS485 Compatible Products
Process Valves
- 2/3 Port Solenoid Valves/Air Operated Valves
- Compact 2/3 Port Solenoid Valves/Air Operated Valves
- Proportional Control Valve
- 5.0 MPa 2/3 Port Solenoid Valves
- 2/3 Port Valves for General Purpose Fluid Control
- Coolant Valves
- Valves for Water and Chemical Base Fluids
Chemical Liquid Valves/Fittings & Needle Valves/Tubing
- Chemical Liquid Valves
- Fittings/Needle Valves
- Tubing
Process Pumps(Diaphragm Pumps)
- Process Pumps
- Liquid Dispense Pump
Temperature Control Equipment
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Inverter Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Dual Channel Thermo chiller for Lasers
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Rack Mount Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
- Chiller Compliant Regulations
- Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
- Air Temperature Controllers
Process Gas Equipment　AP Tech
- Process Gas Equipment
High Vacuum Equipment
- High Vacuum Valves
- Other
- Slit Valves
- Rodless Cylinders for Vacuum
Industrial Filters/Sintered Metal Elements
- Industrial Filters
- Sintered Metal Elements
Pneumatic Instrumentation Equipment
- Positioners
- Regulators
- Relays/Valves
- Electro-Pneumatic Transducers
- Actuators
- Detection Conversion Units
- Solenoid Valves
- Piping Materials
Hydraulic Equipment
- Hydraulic Cylinders
- Hydraulic Equipment

Theme

Chiller Compliant Regulations

Non F-Gas (CO₂ Refrigerant) Refrigerated Thermo-chiller

HRSC

Non F-Gas (CO₂ Refrigerant) Refrigerated Thermo-chiller

HRZC

Non F-Gas Uses (CO₂ Refrigerant) Thermo-chillers for the Semiconductor Industry

INR-495-042/INR-495-043

[Low GWP Refrigerant Chiller] Thermo-chiller Standard Type

HRSF

[Low GWP Refrigerant Chiller] Thermo-chiller Standard Type

HRSF150/200

[Low GWP Refrigerant Chiller] Refrigerated Thermo-chiller

HRZF

[Low GWP Refrigerant Chiller] Thermo-chiller/Rack Mount Type

HRRF

[Low GWP Refrigerant Chiller] Thermo-chiller/Dual Channel Thermo-chiller for Lasers

HRLF