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Clean Gas Filters/Air Filters


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Clean Gas Filter SF

    ・Cartridge type allows for element replacement
    　 (SFA100/200/300, SFB100)
    ・Compact, disposable type for the semiconductor industry
    　(SFB300, SFC100)
Safety Instructions　Air Preparation Equipment/Precautions　Model Selection Guide/Quick Reference Guide　Green Procurement (RoHS)
TypeSeriesOperating pressureFiltration (μm)
Cartridge type discSFA100/200/300Max. 0.99 MPa
（Vacuum: 1.3×10－6 kPa）		0.01
(Filtration efficiency: 99.99%)
Cartridge type straightSFB100Max. 0.99 MPa
（Vacuum: 1.3×10－6 kPa）		0.01
(Filtration efficiency: 99.99%)
Cartridge type straightSFB200Max. 0.99 MPa
（Vacuum: 1.3×10－6 kPa）		120
Disposable type straightSFB300Max. 0.99 MPa
（Vacuum: 1.3×10－6 kPa）		0.01
(Filtration efficiency: 99.99%)
Disposable type multiple discSFC100Max. 0.99 MPa
（Vacuum: 1.3×10－6 kPa）		0.01
(Filtration efficiency: 99.99%)

Clean Air Filter/Hollow Fiber Element SFD

    ・Built-in hollow fiber element
    ・Pressure drop: 0.03 MPa (Inlet pressure 0.7 MPa, Max. flow rate)
    ・Compliant with the RoHS Directives regulations regarding the reduction
    　of environmentally detrimental chemicals
    ・Metal Case Type (Made to Order)
    　Stainless steel, Aluminum cases
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  • Clean Air Filter/Hollow Fiber Element SFD
    Manual
    Series Type View search result
    SFD100Disposable type
    (Non-replaceable element)    		View search result
    SFD110Disposable type
    (Non-replaceable element)    		View search result
    SFD200Cartridge type
    (Replaceable element)    		View search result
Safety Instructions　Air Preparation Equipment/Precautions　Model Selection Guide/Quick Reference Guide　Green Procurement (RoHS)
SeriesTypeFlow rate L/min (ANR)
(At inlet pressure 0.7 MPa)		Operating pressureFiltration (μm)
SFD100Disposable type
(Non-replaceable element)		to 100Max.1.0MPa0.01
(Filtration efficiency: 99.99%)
SFD110Disposable type
(Non-replaceable element)		to 120Max.1.0MPa0.01
(Filtration efficiency: 99.99%)
SFD200Cartridge type
(Replaceable element)		to 500Max.1.0MPa0.01
(Filtration efficiency: 99.99%)

Clean Air Module LLB

    ・Modularized clean equipment (Reduced piping labor/Space saving)
    　Makes clean air easily available
    ・Nominal filtration rating: 0.01 μm (Filtration efficiency: 99.99%)
    ・Wetted parts: Grease-free, Silicone-free
    ・Assembled in a clean room, Shipped and packed in double packaging
    ・24 combinations are available.

    　Note) Inlet air conditions ISO 8573-1 Quality grade: Equivalent to 1.4.1 to 1.6.1
Safety Instructions　Air Preparation Equipment/Precautions　Model Selection Guide/Quick Reference Guide　Green Procurement (RoHS)
SeriesFluidSet pressureFlow range L/min (ANR)
LLB3Clean air
N2 gas Note)		0.05 to 0.4 MPa5 to 100
LLB4Clean air
N2 gas Note)		0.05 to 0.4 MPa50 to 500

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