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High Vacuum Valves
Aluminum High Vacuum Angle Valve XL□
![](https://www.smcworld.com/upfiles/etc/series/en-jp/img1-028-XL.jpg)
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・High fluorine resistance
・Minimal outgassing
・Minimal contamination from heavy metals
∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
discontinued in September 2017.
Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
Safety Instructions System Configuration/Series Variations Auto Switches Common Specifications
Green Procurement (RoHS)
Green Procurement (RoHS)
Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
---|---|---|---|---|---|
XLA | Air operated | Single acting (N.C.) | Bellows seal | Dust-free Cleaned | 16 to 160 |
XLAV (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows seal | Dust-free Cleaned | 16 to 160 |
XLC | Air operated | Double acting | Bellows seal | Dust-free Cleaned | 16 to 160 |
XLCV (With solenoid valve) | Air operated | Double acting | Bellows seal | Dust-free Cleaned | 16 to 80 |
XLF | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation High operating cycles | 16 to 160 |
XLFV (With solenoid valve) | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation High operating cycles | 16 to 160 |
XLG | Air operated | Double acting | O-ring seal | High-speed operation High operating cycles | 16 to 160 |
XLGV (With solenoid valve) | Air operated | Double acting | O-ring seal | High-speed operation High operating cycles | 16 to 80 |
XLD | Air operated | Single acting (N.C.) | Bellows/O-ring seal | For preventing dust turbulence For preventing a pump from running overloaded | 25 to 160 |
XLDV (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows/O-ring seal | For preventing dust turbulence For preventing a pump from running overloaded | 25 to 160 |
XLH | Manual | Manual | Bellows seal | Dust-free Cleaned | 16 to 50 |
XLS | Electromagnetic | Single acting (N.C.) | (Bellows balance) | For portable equipment not requiring air | 16, 25 |
Features
■Aluminum bodied
Uniform baking temperature
Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.
![](/newproducts/en/xla/images/02.jpg)
Lightweight, Compact
Large conductance, small body, excellent resistance against fluorine corrosion (body)
![](/newproducts/en/xla/images/03.jpg)
Low outgassing
Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.
Little heavy metal contamination
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.