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High Vacuum
Can be used at high vacuum of 10-6 Pa. This valve can be used for the exhaust systems, supply systems and block systems of vacuum chambers.
Exhaust System
・Aluminum High Vacuum Angle Valve | XL Series |
・Aluminum One-touch Connection and Release High Vacuum Angle Valve | XLAQ/XLDQ Series |
・Stainless Steel High Vacuum Angle/In-line Valve | XM/XY Series |
Supply System
・High Vacuum Straight Solenoid Valve | XSA Series |
・Smooth Vent Valve | XVD Series |
Block System
・Slit Valve | XGT Series |
・Door Valve (Made to Order) | Please inquire details |
Transfer System
・Rodless Cylinder for Vacuum | CYV Series |