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High Vacuum
Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ
High Vacuum Equipment » High Vacuum Valves-
・One-touch connection and release (No tools are required.)
Safety Instructions System Configuration/Series Variations Auto Switches Common Specifications
Green Procurement (RoHS)
Green Procurement (RoHS)
Series | Actuation | Shaft seal type | Valve type | Material | Flange size |
---|---|---|---|---|---|
XLAQ | Air operated | Bellows seal | Single acting (N.C.) | Body : Aluminum Bellows : Stainless steel 316L | 16 to 50 |
XLDQ | Air operated | Bellows seal O-ring seal | Single acting (N.C.) | Body : Aluminum Bellows : Stainless steel 316L | 40, 50 |