Solutions » Introduction to Industry-Specific Solutions » Photovoltaic Cell Manufacturing Process Equipment »
High Vacuum
Smooth Vent Valve XVD
High Vacuum Equipment » High Vacuum Valves-
・The valve/needle valve-integrated construction requires only 1/4 the piping space of previous models.
・Particle numbers have been significantly reduced through the use of a metal diaphragm in the sheet portion.
・Flow of both the initial air supply and the main air supply can be adjusted.
Series | Valve type | Fluid | Piping | Port size |
---|---|---|---|---|
XVD | Normally closed (Pressurize to open, Spring seal) | Nitrogen, Air, Inert gas, etc. | VCR® Swagelok® | 1/4B |