Switch ⁄ Sensor » Glossary of Terms - Working Principle of Pressure Sensors
●Silicon diaphragm pressure sensor
・A piezoresistance bridge circuit is formed on the single crystal silicon diaphragm.
・When pressure is applied, the diaphragm is deflected causing the resistance value of the piezoresistance to change.
・Output is performed by detecting the change in resistance value.
●Stainless steel diaphragm pressure sensor
・Insulation film and a piezoresistance bridge circuit are formed on the stainless steel diaphragm.
・When pressure is applied, the diaphragm is deflected causing the resistance value of the piezoresistance to change.
・Output is performed by detecting the change in resistance value.
