Solutions » Introduction to Industry-Specific Solutions » Photovoltaic Cell Manufacturing Process Equipment »
Low Vacuum
- Energy Saving
- By Industry ⁄ Process
- Applications
Space Saving Vacuum Ejector (Vacuum Generators)/Pump System ZQ
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
-
・Compatible with ejector systems and vacuum pump systems
・Width: 10 mm, Weight: 109 g (Single unit, with vacuum pressure switch and suction filter)
・Digital vacuum pressure switch
・With LED display function
・Adaptable to manifold applications
∗ The ZQ series will be discontinued in April 2023.
Please select the ZQ□A series.
Safety Instructions Vacuum Equipment/Precautions Series Variations/Model Selection
Green Procurement (RoHS)
Green Procurement (RoHS)
| Ejector series | Nozzle diameter (mm) | Max. suction flow [L/min(ANR)] | Air consumption [L/min(ANR)] | Guidelines for applicable pad (mm) | Vacuum pump system series |
|---|---|---|---|---|---|
| ZQ105 | 0.5 | 5 | 14 | 2 to 13 | ZQ1000 |
| ZQ107 | 0.7 | 10 | 23 | 2 to 20 | ZQ1000 |
| ZQ110 | 1.0 | 22 | 46 | 2 to 32 | ZQ1000 |
Large Size Vacuum Module (Vacuum Generators) ZR
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
-
・Compatible with ejector systems and vacuum pump systems
・Necessary functions can be combined through a modular design.
・Double solenoids provide a self-holding function.
・Adaptable to manifold applications
・Functions such as a digital vacuum switch or a solenoid valve can be selected.
Safety Instructions Vacuum Equipment/Precautions Series Variations/Model Selection
Green Procurement (RoHS)
Green Procurement (RoHS)
| Series | Nozzle diameter (mm) | Max. suction flow [L/min(ANR)] | Air consumption [L/min(ANR)] | Guidelines for applicable pad (mm) | Vacuum pump system series |
|---|---|---|---|---|---|
| ZR110 | 1.0 | 25 | 53 | 2 to 32 | ZR100 |
| ZR113 | 1.3 | 42 | 86 | 2 to 50 | ZR100 |
| ZR115 | 1.5 | 63 | 102 | 2 to 100 | ZR100 |
| ZR118 | 1.8 | 74 | 155 | 2 to 125 | ZR100 |
| ZR120 | 2.0 | 95 | 194 | 2 to 150 | ZR100 |
Compact Vacuum Unit (Vacuum Generators) ZB
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Ejectors (Vacuum Generators)/Vacuum Pump SystemsIO-Link Devices » Vacuum Manifold
-
・Compatible with ejector systems and vacuum pump systems
・Quick response: Response time of the valve 5 ms, vacuum response time
28 ms
・Energy saving: Air consumption reduced by 17%, Vacuum pressure
reached increased by 21%
・Compact/Lightweight: 46 g
・With vacuum pressure switch
Can copy to up to 10 switches simultaneously
・IO-Link compatible
Safety Instructions Vacuum Equipment/Precautions Series Variations/Model Selection
Green Procurement (RoHS)
Green Procurement (RoHS)
| Ejector series | Nozzle diameter (mm) | Max. suction flow [L/min(ANR)] | Air consumption [L/min(ANR)] | Guidelines for applicable pad (mm) | Vacuum pump system series |
|---|---|---|---|---|---|
| ZB03 | 0.3 | 2 | 3.5 | 2 to 8 | ZB00 |
| ZB04 | 0.4 | 3.5 | 6.5 | 2 to 10 | ZB00 |
| ZB05 | 0.5 | 4.5 | 10 | 2 to 13 | ZB00 |
| ZB06 | 0.6 | 7 | 18 | 2 to 20 | ZB00 |
Compact Vacuum Ejector (Vacuum Generators) ZA
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
-
・Total width: 9.9 mm, Total length: 72.9 mm, Total height: 52.5 mm,
Weight: 50 g
・Can be installed on moving parts
・Improved response through the shortening of the length of the tube to the pad
・Adaptable to manifold applications
Safety Instructions Vacuum Equipment/Precautions Series Variations/Model Selection
Green Procurement (RoHS)
Green Procurement (RoHS)
| Series | Nozzle diameter (mm) | Max. suction flow [L/min(ANR)] | Air consumption [L/min(ANR)] | Guidelines for applicable pad (mm) |
|---|---|---|---|---|
| ZA105 | 0.5 | 4 | 12 | 2 to 13 |
| ZA107 | 0.7 | 8 | 28 | 2 to 20 |
Vacuum Module (Vacuum Generators) ZX
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
-
・Compatible with ejector systems and vacuum pump systems
・Necessary functions can be combined through a modular design.
・Ideal for electronic parts or small precision parts weighing up to 100 g
・Adaptable to manifold applications
∗ The ZX (Digital pressure switch ZSE3 product) was discontinued
in June 2019.
Please select the ZQ series, ZK series.
Safety Instructions Vacuum Equipment/Precautions Series Variations/Model Selection
Green Procurement (RoHS)
Green Procurement (RoHS)
| Series | Nozzle diameter (mm) | Max. suction flow [L/min(ANR)] | Air consumption [L/min(ANR)] | Guidelines for applicable pad (mm) | Vacuum pump system series |
|---|---|---|---|---|---|
| ZX105 | 0.5 | 5 | 13 | 2 to 13 | ZX100 |
| ZX107 | 0.7 | 10 | 23 | 2 to 20 | ZX100 |
| ZX110 | 1.0 | 22 | 46 | 2 to 25 | ZX100 |
Vacuum Ejector (Vacuum Generators) ZM
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
-
・Valves and switches are unitized.
・Adaptable to manifold applications
・Maximum absorption flow rate has been increased by 40%.
・Max. vacuum pressure: −84 kPa
Safety Instructions Vacuum Equipment/Precautions Series Variations/Model Selection
Green Procurement (RoHS)
Green Procurement (RoHS)
| Series | Nozzle diameter (mm) | Max. suction flow [L/min(ANR)] | Air consumption [L/min(ANR)] | Guidelines for applicable pad (mm) |
|---|---|---|---|---|
| ZM05 | 0.5 | 15 | 17 | 2 to 16 |
| ZM07 | 0.7 | 23 | 33 | 2 to 25 |
| ZM10 | 1.0 | 38 | 60 | 2 to 32 |
| ZM13 | 1.3 | 44 | 85 | 2 to 40 |
| ZM15 | 1.5 | 45 | 110 | 2 to 50 |
Vacuum Ejector ZH
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Ejectors
-
・Compact and lightweight
Overall length: Max. 11% reduction (6.7 mm shorter) [Body ported type]
Port height: Max. 25% reduction (9.1 mm shorter) [Body ported type]
Weight: Max. 74% reduction (65.1 g lighter) [Body ported type]
Volume: Max. 39% reduction (14.1 cm3 reduction) [Box type]
・4 mounting types:
Direct mounting, Standard bracket mounting, L-bracket mounting,
DIN rail mounting
・A silencer and standard bracket are available. (Body ported type only)
| Body type | Series | Nozzle diameter (mm) | Max. suction flow [L/min(ANR)] | Air consumption [L/min(ANR)] | Guidelines for applicable pad (mm) |
|---|---|---|---|---|---|
| Body ported type | ZH05DSA | 0.5 | 6 | 13 | 2 to 13 |
| Body ported type | ZH07DSA | 0.7 | 12 | 27 | 2 to 20 |
| Body ported type | ZH10DSA | 1.0 | 26 | 52 | 2 to 32 |
| Body ported type | ZH13DSA | 1.3 | 40 | 88 | 2 to 50 |
| Body ported type | ZH15DSA | 1.5 | 58 | 117 | 2 to 100 |
| Body ported type | ZH18DSA | 1.8 | 76 | 165 | 2 to 125 |
| Body ported type | ZH20DSA | 2.0 | 90 | 201 | 2 to 150 |
| Box type (Built-in silencer) | ZH05B□A | 0.5 | 6 | 13 | 2 to 13 |
| Box type (Built-in silencer) | ZH07B□A | 0.7 | 12 | 27 | 2 to 20 |
| Box type (Built-in silencer) | ZH10B□A | 1.0 | 26 | 52 | 2 to 32 |
| Box type (Built-in silencer) | ZH13B□A | 1.3 | 40 | 88 | 2 to 50 |
| Box type (Built-in silencer) | ZH15B□A | 1.5 | 58 | 117 | 2 to 100 |
| Box type (Built-in silencer) | ZH18B□A | 1.8 | 76 | 165 | 2 to 125 |
| Box type (Built-in silencer) | ZH20B□A | 2.0 | 90 | 201 | 2 to 150 |
In-line Type Vacuum Ejector ZU□A
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Ejectors
-
・Compact and Lightweight
O.D.: ø10.4, Weight: 3.9 g, Overall length: 52 mm
・Port size
ø4, ø6 One-touch fitting, Rc1/8 female thread, ø5/32"
・Vacuum pressure reached [kPa]
Type S: -90, -87, -85
Type L: -48, -40
Safety Instructions Vacuum Equipment/Precautions Series Variations/Model Selection
Green Procurement (RoHS)
Green Procurement (RoHS)
| Series | Nozzle diameter (mm) | Max. suction flow [L/min(ANR)] Type S | Max. suction flow [L/min(ANR)] Type L | Air consumption [L/min(ANR)] | Guidelines for applicable pad (mm) |
|---|---|---|---|---|---|
| ZU03□A | 0.3 | 1.8 | 3.4 | 4.2 | 2 to 8 |
| ZU04□A | 0.4 | 3.2 | 5.8 | 7.7 | 2 to 10 |
| ZU05□A | 0.5 | 7 | 13 | 14 | 2 to 13 |
| ZU07□A | 0.7 | 11 | 16 | 28 | 2 to 20 |
