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Clean
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Precision Clean Regulator SRP
Modular F.R.L./Pressure Control Equipment » RegulatorsClean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Pressure Control Equipment » Regulators
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・High-precision low flow consumption stainless steel regulator
・Bleed air flow of 0.5 L/min (ANR) or less (0.2 MPa at outlet pressure)
・Setting sensitivity: 0.3% F.S.
・Repeatability: 1% F.S.
Safety Instructions F.R.L. Units/Precautions Series Variations/Pressure Control Equipment
Product Selection Guide Green Procurement (RoHS)
Product Selection Guide Green Procurement (RoHS)
Series | Port size | Set pressure (MPa) |
---|---|---|
SRP | M5,1/8 | Low pressure type:0.005 to 0.2 High pressure type:0.01 to 0.4 |