Solutions » Introduction to Industry-Specific Solutions » Photovoltaic Cell Manufacturing Process Equipment »
Clean
- Energy Saving
- By Industry ⁄ Process
- Applications
|Clean Room Products
|Clean Blow Products
|Grease-free Products
Normal Close High Vacuum Solenoid Valve XSA
Process Valves » Compact 2/3 Port Solenoid ValvesHigh Vacuum Equipment » High Vacuum Valves
-
・Minimum operating pressure: 1 × 10-6 Pa (abs)
・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
・2 types of fittings and female threads are available.
・Power consumption: Max. 25% reduction
・Weight: Max. 18% lighter (0.5 kg → 0.41 kg)
| Series | Valve type | Fluid | Piping | Port size |
|---|---|---|---|---|
| XSA | Normally closed | Air Inert gas | Face seal fitting Compression fitting | 1/4, 3/8 |
| XSA | Normally closed | Air Inert gas | Rc, NPT female thread | 1/8, 1/4, 3/8 |
