Solutions » Introduction to Industry-Specific Solutions » Equipment for Physical and Chemical Industry » General Purpose Equipment ⁄ Measuring Equipment (Heating ⁄ Cooling) » Thermo-chiller
Equipment for Physical and Chemical Industry
General Purpose Equipment ⁄ Measuring Equipment Heating ⁄ Cooling
Thermo-chiller
Thermo-chiller/Standard Type HRS
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
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・With this chiller, cooling water can be obtained anywhere it is necessary because of easy installation and easy operation.
・For a wide range of applications, such as laser machine tools, analytical equipment,
LCD manufacturing equipment, mold temperature control, etc.
・Compact: W 377 x H 615 x D 500 mm, 40 kg (HRS012/018/024)
・Timer function, Low liquid level protection, Power failure auto-restart,
Anti-freezing function, etc.
・Self diagnosis function
・Ideal for overseas models (Single-phase 200 to 230 VAC, Single-phase 100, 115 VAC)
・Compliant with UL Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS012 to 060 | 5 to 40℃ | 1.3 kW 1.9 kW 2.4 kW 3.2 kW 4.2 kW 5.1 kW 5.9 kW （60 Hz） | ±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration | Tap water Deionized water Ethylene glycol aqueous solution （15％） |
Thermo-chiller/Standard Type HRS090
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
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・Lightweight and compact
・Cooling capacity: 9 kW
・Temperature stability: ±0.5°C
・Set temperature range: 5 to 35°C
・Max. ambient temperature: 45°C
・Power supply: 3-phase 200 to 230 VAC, 380 to 415 VAC, 460 to 480VAC
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS090 | 5 to 35℃ | 9kW (60Hz) | ±0.5℃ | Air-cooled refrigeration Water-cooled refrigeration | Tap water Deionized water Ethylene glycol aqueous solution （15％） |
Thermo-chiller/Standard Type HRS100/150
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
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・No heater is required, as the circulating fluid is heated using only the heat exhausted by the refrigerating circuit.
・Compatible with power supplies in Europe, Asia, Oceania, North, Central, and South America
・Low-noise design: 70 dB (A)
・Outdoor installation: IPX4
・Compact, Space saving
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS100 HRS150 | 5 to 35℃ | 9.5 kW 14.5 kW (60 Hz) | ±1.0℃ | Air-cooled refrigeration Water-cooled refrigeration | Tap water Deionized water Ethylene glycol aqueous solution (15%) |
Thermo-chiller/Inverter Type HRSH090
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Inverter Type
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・Power consumption reduced by 53%
Complete with energy-saving triple inverter!
・Cooling capacity: 9.5 kW (Air-cooled), 11.0 kW (Water-cooled)
・Temperature stability: ±0.1°C
・Set temperature range: 5°C to 40°C
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRSH090 | 5 to 40℃ | 9.5 kW | ±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration | Tap water Deionized water Ethylene glycol aqueous solution (15%) |
Thermo-chiller/Inverter Type HRSH
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Inverter Type
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・Complete with energy-saving triple inverter!
・Outdoor installation, Splashproof type (IPX4)
・Max. ambient temperature: 45℃
・Min. ambient temperature: –20℃ (For the air-cooled type)
・Temperature stability: ±0.1℃ (When a load is stable)
・Space saving and lightweight: 280 kg (25 kW type)
・Compliant with UL Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRSH | 5 to 35℃ | 10 kW 15 kW 20 kW 25 kW 28 kW | ±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration | Tap water Deionized water Ethylene glycol aqueous solution (15%) |
Thermo-chiller/Basic Type HRSE
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
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・Complete with energy-saving triple control!
Reduces power consumption by 33%
・Compact and lightweight: 32 kg (100 VAC)
・Maintenance-free: Magnet pump
・Low-noise design: 55 dB (A)
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRSE | 10 to 30℃ | 1.2 kW 1.6 kW 2.2 kW (60 Hz) | ±2.0℃ | Air-cooled refrigeration | Tap water Ethylene glycol aqueous solution (15%) |
Thermo-chiller/Rack Mount Type HRR
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Rack Mount Type
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・Operable without the need to remove the unit from the rack
Front access: Simple to control, service, and maintain with all filters and drainage accessible via the front panel
・Space saving: Multiple chillers can be mounted to a 19-inch rack.
・Cooling capacity: 1.1/1.2/1.8/2.4/3.0/5.1 kW (60 Hz)
・Temperature stability: ±0.1℃
・Global power supply:
Single-phase 100 VAC (50/60 Hz)/115 VAC (60 Hz)
Single-phase 200 to 230 VAC (50/60 Hz)
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRR | 5 to 35℃ 15 to 35℃ | 1.1 kW 1.2 kW 1.8 kW 2.4 kW 3.0 kW 5.1 kW | ±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration | Tap water Ethylene glycol aqueous solution (15%) |
Thermo-chiller/High-performance Type HRZ
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance Type & Inverter Type
This product can only be shipped to China, Taiwan, Korea, Singapore,Malaysia, and Japan. For use in regions other than the aforementioned, order the HRZ-F.
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・Suitable for semiconductor processing equipment with a wide variety of
features, such as high-temperature stability, a wide temperature range,
failure diagnosis, external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZ | -20 to 40℃ 20 to 90℃ -20 to 90℃ | 1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration | Fluorinated fluids/Ethylene glycol aqueous solution (60%)/Tap water, Deionized water |
Thermo-chiller/High-performance Inverter Type HRZ
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers)Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
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・In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency.
・A wide temperature range and cooling capacity range are covered by one unit.
・Suited to the short innovation cycle of semiconductor equipment,
Capable of responding flexibly to changes in the process conditions
・Compliant with UL Standards, SEMI Standards, CE-marking
∗ The HRZ series will be discontinued in December 2022.
Please select the HRZ-F series.
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZ | −20 to 90℃ 10 to 60℃ | 10 kW | ±0.1℃ | Water-cooled refrigeration | Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
Dual Thermo-chiller/High-performance Inverter Type HRZD
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・Temperatures for 2 systems can be controlled separately by one chiller.
・Double inverter type: Substantially more energy is saved by using a DC inverter refrigerator and inverter pump.
・Space saving: Footprint reduced by 23%
・Reduced wiring, piping, and labor: Single power cable, Single facility-water piping system
・Compliant with SEMI Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZD | −30 to 90℃ | 9.5 kW x 2 | ±0.1℃ | Water-cooled refrigeration | Fluorinated, Ethylene glycol aqueous solution (60%) |
Water-cooled Thermo-chiller/High-performance Type HRW
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible ProductsTemperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance Type & Inverter Type
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・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not required.
・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRW | 20 to 90℃ | 2 kW, 8 kW, 15 kW, 30 kW | ±0.3℃ | Water-cooled type (Without compressor) | Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
