Vacuum Equipment

Vacuum Pads ZP3/ZP2/ZP Series - Select from the Workpieces

Select from the Workpieces:IC Parts

Precautions

Static electricity free・・・ Use conductive materials.
Since ozone is generated when an ionizer or etc. is used, avoid using NBR and conductive NBR.

<When the workpiece and pad do not separate>

  • Consider reducing the vacuum pressure.
  • Consider revising the release air circuit.
  • Consider changing to a blast-type pad specification.
  • Consider reducing the pad diameter.

Short-type Pad

Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

■Space-saving in the height direction

MU Flat ZP2 φ2, φ3.5, φ4, φ5, φ6, φ8, φ10, φ15 Details
EU Flat ZP2 φ2, φ4, φ6, φ8, φ15 Details
AU Flat ZP2 φ2, φ3, φ4, φ6, φ8 Details

Compact Pad

Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

■Flat
For adsorption of general workpieces. For adsorption of workpieces with flat and not deformed surface.

■Flat with rib
For a workpiece which is likely to deform or for releasing a workpiece certainly.

■Thin flat
For a workpiece which is likely to deform.

■Bellows
For adsorption of workpieces with inclined surface.

U Flat ZP φ2, φ4, φ6, φ8 Details
ZP2 φ3, φ4 - - Details
ZP3 φ1.5, φ3.5 Details
C Flat with rib ZP2 φ6, φ7, φ8 - - Details
UT Thin flat ZP2 φ5, φ6 - - Details
B Bellows ZP φ6, φ8 - Details
ZP2 φ4,φ6, φ8 - - Details
ZP3 φ4, φ6, φ8 Details

Flat Pad

Variations Symbol Type Series Pad diameter Adapter type Buffer
(ZP)
WEB Catalog

■For adsorption of general workpieces.
■For adsorption of work pieces with flat and not deformed surface.

U flat ZP φ2, φ4, φ6, φ8, φ10, φ13,
φ16, φ20, φ25, φ32, φ40, φ50
Details
U Flat ZP2 φ3, φ4 Details
U Flat ZP3 φ1.5, φ3.5 Details
MU Flat ZP2 φ2, φ3.5, φ4, φ5, φ6, φ8, φ10, φ15 - Details
EU Flat ZP2 φ2, φ4, φ6, φ8, φ15 - Details
AU Flat ZP2 φ2, φ3, φ4, φ6, φ8 - - Details

Flat Pad with Rib

Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

■For a workpiece which is likely to deform.
■For releasing a workpiece certainly.

C Flat Pad with rib ZP φ10, φ13, φ16, φ20, φ25, φ32, φ40, φ50 Details
C Flat Pad with rib ZP2 φ6, φ7, φ8 Details

Flat Pad with Groove

Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

■For a workpiece which is likely to deform.
■For releasing a workpiece certainly.

UM Flat with groove ZP3 φ4, φ6, φ8, φ10, φ13, φ16 Details

■For adsorption of general workpieces.
■To be used when adsorption surface of the workpiece is flat and not deformed.

UM Flat type with groove ZP3E φ32,φ40,φ50,φ63,φ80,φ100,φ125 Details

Thin Flat Pad

Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

■For a workpiece which is likely to deform.

UT Thin flat ZP φ10, φ13, φ16 Details
UT Thin flat ZP2 φ5, φ6 φ11, φ14, φ18, φ20 Details

Thin Flat Pad with Rib

Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

■For a workpiece which is likely to deform.
■For releasing a workpiece certainly.

CT Thin flat with rib ZP φ10, φ13, φ16 Details

Nozzle Pad

Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

■For adsorption of small components such as IC chips.

AN Nozzle ZP2 φ0.8, φ1.1 - Details

Blast-type Pad

Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

■Blast treatment to create finely uneven surface for adsorption.

Workpieces can be removed easily.

U Flat ZP2 φ4 - - Details
C Flat with rib ZP2 φ6, φ8 - - Details
UM Flat with groove ZP3 φ4,φ6,φ8,φ10,φ13,φ16 Details
B Bellows ZP2 φ6, φ8 - - Details
J Bellows
(Multistage type)
ZP2 φ10, φ15, φ25, φ30 - - Details
MU Flat ZP2 φ2, φ3.5, φ4, φ5,
φ6, φ8, φ10, φ15
- Details
EU Flat ZP2 φ2, φ4, φ6 - Details
MT Thin flat
(With groove)
ZP2 φ10, φ15, φ20, φ25, φ30 - Details
MB Bellows ZP2 φ4, φ6, φ8,
φ10, φ15, φ20
- Details

Oval Pad

Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

■For work pieces with limitations on the adsorption surface.

U Oval ZP 2×4, 3.5×7, 4×10 Details
W Oval ZP2 3.5×7, 4×10, 4×20, 4×30, 5×10, 5×20,
5×30, 6×10, 6×20, 6×30, 8×20, 8×30
Details

Mark-free Pad

Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

■For use where adsorption marks must not be left on workpieces.

U Flat ZP2 φ4, φ6, φ8, φ10, φ16, φ25, φ32, φ40, φ50 - - Details
H Heavy-duty
(Flat with rib)
ZP2 φ40, φ50, φ63, φ80, φ100, φ125 - - Details

Resin Attachment

Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

■Mark-free.
■Prevents sticking of the rubber and the workpieces.

K Bellows ZP2 φ6, φ8, φ10, φ13, φ16, φ20, φ25, φ32 - - Details

Pad with Ball Spline Buffer

Variations Symbol Type Series Pad diameter Adapter type Buffer WEB Catalog

■Ball spline guide is used to the buffer.

U Flat ZP2 φ2, φ4, φ6, φ8 Details

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